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Automatic Modular 3D X-ray Offline CT Inspection System For Semicon
Automatic Modular 3D X-ray Offline CT Inspection System For Semicon Automatic Modular 3D X-ray Offline CT Inspection System For Semicon
Automatic Modular 3D X-ray Offline CT Inspection System For Semicon Automatic Modular 3D X-ray Offline CT Inspection System For Semicon
Automatic Modular 3D X-ray Offline CT Inspection System For Semicon Automatic Modular 3D X-ray Offline CT Inspection System For Semicon

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Automatic Modular 3D X-ray Offline CT Inspection System For Semicon

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The 3D X-ray inspection system MirXT-160 is specially tailored for wafer technology, SMT, packaging inspection, semiconductor and laboratory applications. The equipment is used to detect solder/tin voids and bonding wires generated in the SMT/semiconductor manufacturing process in the electronic industry. Packaging defects such as offset, wire cross short circuit, flip-chip solder ball virtual soldering, flip-chip solder ball short circuit, wire breakage, wire detachment, etc.
  • MirXT-160

  • ELT

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3D X-ray CT Inspection System For Semicon/Electronics Inspection--MirXT-160

3D CT x-ray MirXT-160_5818_5818

Equipment overview

The 3D X-ray inspection system MirXT-160 is specially tailored for wafer technology, SMT, packaging inspection, semiconductor and laboratory applications. The equipment is used to detect solder/tin voids and bonding wires generated in the SMT/semiconductor manufacturing process in the electronic industry. Packaging defects such as offset, wire cross short circuit, flip-chip solder ball virtual soldering, flip-chip solder ball short circuit, wire breakage, wire detachment, etc.

Functions and Feature

1. Modular design, user-customized system

2. Multi-axis motion control system enables clear detection from different angles

3. Automatic real-time navigation chart and x-ray image navigation chart function

4. Specially designed OVHM module, the detector can rotate 360 degrees horizontally and tilt 70 degrees

5. Ultra-high-speed, high-definition CT images

6. Product process programming, with automatic detection function, 5-axis interpolation function, visual CNC detection, and unlimited point editing

7. Digital real-time image processing technology, professional configuration HDR image enhancement technology functions

8. Maximum tube voltage: 160KV, maximum power 20W

9. Geometric magnification up to 2100x, total magnification up to 23000x

10. The smallest detection capability can reach: 0.35 micron

11. ovhm technology High magnification bevel detection

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Technical specifications

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X-ray imaging

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Note: The above information only represents general descriptions and characteristics, which may change with technological advancement and equipment upgrades. Specific parameters are subject to the final agreement.


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